The Photoluminor-D was developed for analyzing the small quantities of impurities that exist in silicon, which is the most commonly used element for semiconductors. The application of photoluminescence for the purpose of quality control has been studied for many years, and in 1977, Dr. Michio Tajima of the Electrotechnical Laboratory (currently with the Institute of Space and Astronautical Science: ISAS) developed a method that enables quantitative analysis of impurities in silicon using photoluminescence. The method makes it possible to analyze impurities, such as B, P, AL and As, in silicon at accuracies down to ppta. The quantitative analysis of impurities in silicon using photoluminescence is ASTM and JIS registered. |
- Photoluminescence measurement of silicon needs to be conducted under weak excitation. This is because strong excitation generates a phenomenon called droplet that prevents accurate calibration. At first, a set of eight specially coated aplanatic lens of F/0.9 brightness was used to perform this measurement. Subsequent improvements in detector sensitivity have made it possible to use condensing lenses that are equivalent to PL-S.
- The Photoluminor-D comes with a TV camera for improved operability, by allowing samples to be positioned with good repeatability and thereby achieving a constant excitation power density.
- The dedicated software "AMAMI" not only enables quantitative analysis of B, P, Al and As, but it also simultaneously determines resistivity and P/N
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