Diffraction Grating

  Monochromator / CCD detector

  ICP Optical Emission Spectrometer

  GD-Profiler Series

  Spectrofluorometer

  Fluorescence Lifetime
  Spectrometer

  Spectro-ellipsometer

  Semiconductor and liquid cyrstal
  process monitors

  Cathodoluminescence
  Spectrophotometer

  Photoluminescence
  Spectrophotometer

  Raman Spectrophotometer

  Forensic Systems

The UVISEL series spectro-ellipsometers achieve high-speed, high-precision measurements by using a photoelastic modulator (PEM) for phase modulation. Many organizations in Japan, including public research institutions, use the UVISEL series spectro-ellipsometers.

• Measurement of film thickness and opticalparameters of semiconductors, LCDs, and optical thin films